Papers, Application Notes 


CAPRES continues to publish scientific papers related to our probe-technology at international conferences and in scientific journals, as well as releasing relevant Application Notes on our technology



Papers & Resources





Available documents






A Comparative Study Of Size Dependent Four-point Probe Sheet Resistance Measurement On Laser Annealed Ultra Shallow Junctions
D.H. Petersen et al, INSIGHT 2007
Advanced Carrier Depth Profiling on Si and Ge with M4PP
T. Clarysse et al, INSIGHT 2007
Accurate Sheet Resistance Measurement on Ultra-Shallow Profiles
T. Clarysse et al, MRS 2006
Beyond SRP - Quantitative carrier profiling with M4PP
T. Clarysse et al, E-MRS 2006
Micro-Scale Sheet Resistance Measurements On Ultra Shallow Junctions
C.L. Petersen et al, RTP Conference 2006
Electrical Resistance of Laser Sintered Direct-Write Deposited Materials for Microelectronic Applications
Valery P. Marinov (2004)
Variable-Temperature Micro-Four-Point Probe Method for Surface Electrical Conductivity Measurements in Ultrahigh Vacuum
T. Tanikawa et al

Direct Measurement of the Microscale Conductivity of Conjugated Polymer Monolayers

P. Bøggild et al, Adv. Materials, 2000, 12, No. 13, July 5

Application Notes



An in-situ four-point probe method for the electrical characterization of beam induced depositions
J.J.L. Mulders, FEI
Joint work by FEI, Kleindiek Nanotechnik and CAPRES
Application Note - The CIPT Model
Application Note - CIPTech Sample Preparation
Application Note - Calculation of Correlation Coefficient in CIPT fitting result
Application Note - Selecting the right probe type
Micro Four Point Probe General Application Note
Application Note - Handling of Microscopic Multi-Point Probes

Other Micro Multi-Point Probe related scientific papers


Microprobe Metrology for direct Sheet resistance and Mobility Characterization. Peter Folmer Nielsen et al, IWJT2012

D.W. Abraham et al, Rapid-turnaround characterization methods for MRAM development, IBM Journal of Research and Development, Vol. 50 No. 1, January 2006


J. W. Wells, K. Handrup, J. F. Kallehauge, L. Gammelgaard, P. Bøggild, M. B. Balslev, J. E. Hansen, P. R. E. Petersen, Ph. Hofmann. The conductivity of Bi(111) investigated with nanoscale four point probes. App. Phys. 104, 053717 (2008).


L. Gammelgaard, P. Bøggild, J. W. Wells, K. Handrup. Ph. Hofmann, M. B. Balslev, J. E. Hansen, P. R. E. Petersen. A complementary metal-oxide-semiconductor compatible monocantilever 12-point probe for conductivity measurements on the nanoscale. App. Phys. Lett. 93, 093104 (2008). 


J. W. Wells, J. F. Kallehauge, T. M. Hansen, and Ph. Hofmann, Thermal Switching of the electrical conductivity of Si (111) (√ 3x√ 3) Ag due to surface phase transition, Journal of  Physics: Cond. Matt., 19, 176008 (1-7) (2007)


J. W. Wells, J. F. Kallehauge, T. M. Hansen, and Ph. Hofmann, Disentangling surface, bulk and space-charge layer conductivity: Si (111) (7 x 7), Phys. Rev. Lett. 97, 206803 (2006)


D. C. Worledge et al, “Magnetoresistance measurement of unpatterned magnetic tunnel junction wafers by current-in-plane tunneling”, paper BD-01, 9th joint MMM/intermag Conference 2004

K. Tsunekawa et al, “Over 60% TMR at room  temperature in MTJ films prepared with surface modification process”, Paper B-P-03, 9th Joint MMM/Intermag Conference 2004.


D. C. Worledge and P. L . Trouilloud, Magnetoresistance measurement of unpatterned magnetic tunnel junction wafers by current-in-plane tunneling, Appl. Phys. Lett., 83 No. 1, pp. 84-86 (2003)

C. L. Petersen et al., Reproducibility of Nano- and Micro-Scale Multi-Point Probe Sheet Resistance Measurements, Mat. Res. Soc. Proc., 738 (2003) 157.

S. Hasegawa and F. Grey, Electronic transport at semiconductor surfaces - from point-contact transistor to micro-four-point probes, Surf. Sci. 500 (2002) 84

S. Hasegawa et al., Direct Measurement of Surface-State Conductance by Microscopic Four-Point Probe Method, J. Phys.:Condens Matter 14 (2002) 8379 begin_of_the_skype_highlighting              (2002) 8379      end_of_the_skype_highlighting

C. L. Petersen et al., Scanning Microscopic Four-Point Conductivity Probes, Sensors and Actuators A 96 (2002) 53

S. Hasegawa at al., Surface-State Bands on Silicon Si(111)-Sqrt3xSqrt3-Ag Surface Superstructure, Jap. J. Appl. Phys. 39 (2000) 3815 begin_of_the_skype_highlighting              (2000) 3815      end_of_the_skype_highlighting

Shiraki et al., Micro-Four-Point Probes in a UHV Scanning Electron Microscope for in-situ Surface-Conductivity Measurements, Surface Review and Letters, 7 (2000) 533

C. L. Petersen et al., Micro-Four-Point Probe for Studying Electronic Transport Through Surface States, Appl. Phys. Lett. 77 (2000) 3782 begin_of_the_skype_highlighting              (2000) 3782      end_of_the_skype_highlighting



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